With the rapid development of semiconductor technology, the application of linear guides in the field of semiconductor equipment is becoming more and more extensive. From wafer manufacturing to packaging and testing, linear slide rail guides play a vital role.
1. Wafer Manufacturing
During the semiconductor manufacturing process, wafers need to be accurately transported between multiple devices, such as from coaters to exposure machines, from etchers to annealing furnaces, etc. Linear slide rail guides can accurately control the movement path of the wafer, ensure smooth wafer handling, ensure no damage, and avoid surface damage or inaccurate positioning of the wafer due to vibration or deviation. Especially in high-precision processing, the guide system provides the required precise positioning and stability.
2. Sorting Machine
Wafer after the manufacturing process needs to be classified, sorted and distributed for subsequent testing, packaging or further processing. Sorting machines require high-precision, high-speed and stable motion control, and linear guides are an important part of achieving these requirements. Linear slide rail guides provide precise linear motion to ensure that wafers move and position smoothly in the sorting machine.
3. Automatic Testing Equipment
Automated testing equipment is used in the semiconductor production process to detect the performance of chips and ensure quality. During the test, the chip needs to be placed accurately on the test platform, and the linear slide rail guide can ensure the high-precision positioning of the test equipment. At the same time, the test system needs to move the parts quickly and stably for multi-point testing, and the linear guide can ensure the smoothness of the movement.
4. Packaging Test
In the packaging test link, the linear slide rail guide is responsible for placing the wafer or chip accurately on the test platform or packaging system. The linear guide can ensure that the test equipment can accurately position and test the chip, providing a strong guarantee for the quality and reliability of semiconductor products.
5. Material Specifications of Linear Slide Rail Guide Components for Semiconductor Vacuum
In a vacuum environment, resin and rubber will emit a large amount of gas, which will cause pollution, so all parts must be made of full metal.
| Linear guide parts | Material specifications |
| Rail, slider | Martensitic stainless steel |
| Ball | SUS440C |
| End cover, cage circulation parts | Austenitic stainless steel |
6. Development Prospects
In the future, we can expect linear slide rail guides to be widely used in more fields, promoting the intelligent, efficient and green development of industrial production. At the same time, with the continuous innovation and upgrading of technology, the performance of linear guides will be further improved, injecting new vitality into the development of modern industry.
Summary
In semiconductor equipment, linear slide rail guides ensure high-precision, stable and low-noise motion, especially in multiple key production stages such as wafer handling and packaging. They are essential to ensure high precision, reduce defects and improve production efficiency in the semiconductor production process, which directly affects the quality and output of semiconductor products.
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